Description
Advanced manufacturing and surface engineering of thin films, coatings and nanostructures; functional and multifunctional properties of thin films and coatings for applications in optics, photonics, optoelectronics, aerospace, biomedical engineering, transport, energy and environment. Physico-chemical reactions during plasma-assisted deposition; basics of plasma physics; plasma-surface interactions - effect of ions and photons; process diagnostics and monitoring. Film growth and evolution of the film micro- and nanostructure - structure zone models. Single layer, multilayer, inhomogeneous (graded) layer and nanocomposite systems, effect of interfaces. Optical properties of thin films, design of simple and advanced optical filters, optical metrology - spectroscopic ellipsometry and reverse engineering. Nanomechanical and tribological properties and metrology - friction, wear, fracture, erosion and corrosion mechanisms. Electrical properties of dielectric and metal films. Active (dynamic) films and smart systems: electro- and thermochromic properties, catalytic and other properties. Examples of case studies for advanced applications.