Microfabrication Laboratory

Affiliated To

• Department of Engineering Physics

Contact Information

• Telephone: (514) 340-4711 # 7459
• Fax: (514) 340-3218
• Email: olivier.grenier@polymtl.ca
• Web Site: http://www.gcmlab.ca/

Professors/Researchers

• Arthur Yelon, Responsible
• Yves-Alain Peter, Co-responsible
• Olivier T. Guenat, member

Research Specification

Microfabrication laboratory in cleanrooms environment for academic and industrial users.

Research Personnel

• Professors/Researchers: 3
• Research Assistants and Technicians: 5

Specialized Equipments

• Dual focus ion beam (FEI strata DB-235)

Patterning, local deposition and etching, device characterization

• Deep Reactive Ion Etching (Plasmalab 100, ICP 180)

Cryo and Bosch deep silicon etching

• Mask aligners (Karl Suss MA-4 et MBJ-3)

IR alignment back side alignment

1 µm resolution and alignment accuracy

• E-beam and magnetron sputtering deposition chamber for metallic material

6 crucibles (Cr, Au, Ti, Ag, Ni, Pt, material on request)

4 sputtering targets (NiCr, Pd, Co, Cu, material on request)

Co-sputtering

• Magnetron sputtering system for ceramics and complex materials
• Vapor HF etcher (Idonus)
• Critical point dryer (Tousimis 815B C series)
• Rapid Thermal Annealing (AG associate 410)

N₂, N₂H₂, Ar and O₂ gases

Thermocouple and pyrometer temperature control

• Parylene coater (Cookson PDS 2010 II)
• Ozone cleaner (UVOCS)
• Reactive ion etching (Technics)
• Wet etching capabilities
• TMAH anisotropic etching
• Nikon microscope with Normasky prism
• Dektak (Veeco dektak 3st)
• Scanning Electron Microscopes (Philips XL-20)
• Thermal oxidation furnace (Thermco)

External Sources of Funding

NanoQuébec; NSERC; FQRNT and Fee Users.