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Deposition of hard carbon coatings using combined inductively and capacitively coupled plasma sources
depositionofhardcarboncoatingsusingcombinedinductivelyandcapacitivelycoupledplasmasources JOURNAL 2005 Zhang, G. F., Reuter, S., & Buck, V. (2005). <a href="https://publications.polymtl.ca/44039/">Deposition of hard carbon coatings ...
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